On the basis of MEMS technology, using semiconductor micromachining technology, the microfluidic structure is etched on the surface of the chip, and the multifunctional integrated microfluidic components are packaged to form a microfluidic chip. The microfluidic chip is a combination of chip technology and microfluidic technology based on the MEMS manufacturing process, not only to realize the storage and transmission of information on the chip (350nm), but also to combine the microfluidic technology, the 300-600 nozzle holes (11-28um/hole) are processed to form on the same chip, the microfluidic jet is realized by controlling multiple pulse signals on the chip, which is a typical semiconductor characteristic process.